A bio-compatible electrical element including a high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy wherein a TiO₂ layer is between the bio-compatible electrical element and a biological such as human environment. A continuous and substantially pinhole free dielectric amorphous Ti_xAl_1-xO_y oxide alloy wherein x is in the range of from about 0.5 to about 0.7 and y is in the range of about 2 to about 3 and having a TiO₂ layer exterior thereto formed into a passive element such as a capacitor or an active element such as a microchip is disclosed.