Published August 1, 2023
| Version v1
Patent
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Dual low vacuum-ultrahigh vacuum system for large-scale production of micro-channel plate photomultipliers
Creators
- 1. University of Chicago
Contributors
Patent applicant:
Description
Systems and methods for the batch production of large numbers of highly uniform multichannel-plate photomultiplier tubes (MCP-PMTs) for large-scale applications are provided. The systems and methods employ dual, nested low-vacuum (LV) and UHV processing in a rapid-cycling, small-footprint, scalable, batch-production facility that is capable of fabricating many MCP-PMTs simultaneously.
Files
US_11715616_B2.pdf
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Additional details
Identifiers
- Patent number
- US 11715616 B2
- Patent application number
- US 202017082292 A
- Other
- oai:uchicago.tind.io:8325
Dates
- Patent filed
-
2020-10-28