Published June 30, 1998
| Version v1
Patent
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Method for the preparation of nanocrystalline diamond thin films
- 1. University of Chicago
- 2. Argonne National Laboratory
Description
A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.
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US5772760.pdf
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Additional details
Identifiers
- Patent application number
- US 54091695 A
- Patent number
- US 5772760 A
- Other
- oai:uchicago.tind.io:8755
Dates
- Patent filed
-
1995-10-11