Published May 6, 2021
| Version v1
Patent
Open
Dual Low Vacuum-Ultrahigh Vacuum System for Large-Scale Production of Micro-Channel Plate Photomultipliers
Creators
- 1. University of Chicago
Contributors
Patent applicant:
Description
Systems and methods for the batch production of large numbers of highly uniform multichannel-plate photomultiplier tubes (MCP-PMTs) for large-scale applications are provided. The systems and methods employ dual, nested low-vacuum (LV) and UHV processing in a rapid-cycling, small-footprint, scalable, batch-production facility that is capable of fabricating many MCP-PMTs simultaneously.
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US_2021_0134552_A1.pdf
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Additional details
Identifiers
- Patent number
- US 2021/0134552 A1
- Patent application number
- 202017082292
- Other
- oai:uchicago.tind.io:9733
Dates
- Patent filed
-
2020-10-28