Dates,41467_2025_56454_MOESM3_ESM,Deterministic-multi-phonon-entanglement-between-two-mechanical-resonators-on-separate-substrates,Supplementary-information
2025-02-10,1,5,2
2025-02-11,0,0,0
2025-02-12,1,1,0
2025-02-13,0,1,0
2025-02-14,0,0,2
2025-02-15,0,0,0
2025-02-16,0,0,0
2025-02-17,0,0,1
2025-02-18,0,0,0
2025-02-19,0,0,0
2025-02-20,2,4,0
2025-02-21,0,2,0
2025-02-22,0,2,0
2025-02-23,0,0,0
2025-02-24,0,0,0
2025-02-25,0,3,0
2025-02-26,0,1,0
2025-02-27,0,1,1
2025-02-28,0,1,0
2025-03-01,0,0,0
2025-03-02,0,2,0
2025-03-03,0,2,0
2025-03-04,0,1,0
2025-03-05,0,0,0
2025-03-06,0,1,0
2025-03-07,0,0,0
2025-03-08,0,0,0
2025-03-09,0,0,0
2025-03-10,0,1,0
2025-03-11,0,1,0
2025-03-12,0,0,0
2025-03-13,0,0,0
2025-03-14,0,0,0
2025-03-15,0,1,0
2025-03-16,0,0,0
2025-03-17,0,0,0
2025-03-18,0,0,0
2025-03-19,0,1,0
2025-03-20,0,0,0
2025-03-21,0,0,0
2025-03-22,0,0,0
2025-03-23,0,1,0
2025-03-24,0,0,0
2025-03-25,0,0,0
2025-03-26,0,0,0
2025-03-27,0,0,0
2025-03-28,0,0,0
2025-03-29,0,0,0
2025-03-30,0,0,0
2025-03-31,0,0,0
2025-04-01,0,1,0